What's Included
- Integrated spectrometer/light source unit
- MA-Cmount microscope adapter with Cmount fitting
- Fiber optic patch cable
- BK7 reflectance standard
- TS-Focus-SiO2-4-10000 Focus/Thickness standard
- 4", 6" and 200mm wafer reflectance standards
- Vacuum pump
- Spare TH-1 lamp
Model Specifications
Model | Thickness Range* | Wavelength Range |
---|---|---|
F54 | 20nm-40µm | 380-850nm |
F54-UV | 4nm-30µm | 190-1100nm |
F54-NIR | 40nm-100µm | 950-1700nm |
F54-EXR | 20nm-100µm | 380-1700nm |
F54-UVX | 4nm-100µm | 190-1700nm |
Spot Size | 500µm Aperture | 250µm Aperture | 100µm Aperture | 50µm Aperture |
---|---|---|---|---|
5x Objective: | 100µm | 50µm | 20µm | 10µm |
10x Objective: | 50µm | 25µm | 10µm | 5µm |
15x Objective: | 33µm | 17µm | 7µm | 3.5µm |
50x Objective: | 10µm | 5µm | 2µm | 1µm |
Additional Perks
- Library with over 130 materials included with every system, along with access to 100s more
- Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
- Online "Hands On" support (internet connection required)
- Hardware upgrade program
Common Optional Accessories
- NIST-traceable thickness standard
- F50 chucks - 100mm, 200mm, 300mm, and 450mm (F50-450 req’d for 450mm chuck)