What's Included
- Integrated stage/spectrometer/light source unit (chuck not included)
- 4", 6" and 200mm wafer reflectance standards
- TS-SiO2-4-7200 Thickness standard
- Vacuum pump
- Spare TH-1 lamp
Model Specifications
Model | Thickness Range* | Wavelength Range |
---|---|---|
F60-t | 20nm-70µm | 380-1050nm |
F60-t-UV | 5nm-40µm | 190-1100nm |
F60-t-NIR | 100nm-250µm | 950-1700nm |
F60-t-EXR | 20nm-250µm | 380-1700nm |
F60-t-UVX | 5nm-250µm | 190-1700nm |
F60-t-XT | 0.2µm-450µm | 1440-1690nm |
F60-t-s980 | 4µm-1mm | 960-1000nm |
F60-t-s1310 | 7µm-2mm | 1280-1340nm |
F60-t-s1550 | 10µm-3mm | 1520-1580nm |
Thickness Range*
Additional Perks
- Library with over 130 materials included with every system, along with access to 100s more
- Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
- Online "Hands On" support (internet connection required)
- Hardware upgrade program
Common Optional Accessories
- NIST-traceable thickness standard
- F60 chucks - 200mm, and 300mm