• Profilm3D$23,500

  Optical profiler with VSI & PSI measurement capabilities and autofocus. (Requires Mirau objective.)

• Auto XY StageIncluded with Profilm3D

  Stage with 100mm x 100mm of motorized XY travel.

• Tip-Tilt StageIncluded with Profilm3D

  4-degree tip-tilt stage.

• Turret-Profilm3D-ManualIncluded with Profilm3D

  Manual 4-place turret for Profilm3D, auto position sensing.

• SHS-CrOnSi-10µm Included with Profilm3D

  Step-height standard with 10µm step. Cr surface on 1.25" square Si.

• OBJ-10X-Mirau$2,310

  10x Nikon Mirau interferometric objective lens. (Contact us for pricing on other magnifications.) Add to Cart

• UPG-Stitching$1,310

  Upgrade software module for stitching of Profilm3D XY grid of profiles. Add to Cart

• SHS-CrOnSi-Multi-4µm $710

  Step-height standard with 4µm, 2µm, and 100nm steps. Cr surface on 1.25" square Si. Add to Cart

• TrueMap-ver5$1,350

  TrueMap surface topography visualization and analysis software, by TrueGage. Add to Cart

• SpaceMouse-Wireless$129

  SpaceMouse Wireless for 3D navigation of profile display and joystick control of XY stage. Add to Cart

• VibrationIsolation-Nano30$6,311

  Active vibration isolation system - Accurion Nano30. Add to Cart

The above prices are applicable in North America only. International pricing varies due to taxes, import fees, shipping, handling, warranty length, and onsite sales and support expectations.